Furthermore, controlling the rate improves the film quality. The rate feedbacks to the deposition power supply. Measuring the frequency catches up drastically changes and the product life.Ĭalculating the laminate thickness predicts process endpoints and film thickness of multilayer film deposition. In conclusion, CRTM is available to calculate and confirm 3 key indications to automatically operate the deposition processes. The thickness of the laminated film and that speed time determine the deposition speed rate.The substance attached area and material density calculate the thickness of the substances.Changing frequency indicates the mass (g) of substances on the quartz crystal plate.The more mass increases, the fewer frequency decreases.It vibrates and catches substances on the surface. The quality of the quartz crystal blank is critical to the performance of quartz crystal units and the high Q factor of quartz means that tight stabilities can be achieved this is key to ensuring microprocessor timing circuits work. 5MHz means it vibrates 5 million times/sec. Quartz crystal resonators are used in a wide range of electronic applications that require timing devices. When it comes to ULVAC's quartz crystal plates vibrate 4MHz, 5MHz, or 6MHz. However, they are also found inside test and measurement equipment, such as counters, signal. Most are small devices built for wrist-watches, clocks, and electronic circuits. An estimated two billion (2 × 10 9) quartz oscillators are manufactured annually. What determines the vibration frequency of the quartz crystal plates? The formation such as cutting angle and thickness does. Quartz crystal oscillators are by far the most common time and frequency standard.

Going straight to the point, CRTM automates the deposition process.īut, HOW? The key principle is Quartz Crystal Oscillation, sliding vibration of the quartz crystal plate. ULVAC's CRTS forms electrodes of gold and silver films on a 12.4 mm diameter quartz crystal palate's surface. The quartz crystal applied voltage is deformed, called Inverse Piezoelectric Effect.īoth sides of the quartz crystal plate cut from at a specific angle are applied voltage, starting a certain vibration called Resonance.The quartz crystal under mechanical pressure produces electricity on the surface, called Piezoelectric Effect.Quartz crystal is a colorless and transparent crystal formed of silicon dioxide. 'Controller' is for controlling devices.'Deposition' is for film deposition processes.The mesh consists of SiO 4-groups whose spatial orientation are different in different planes of the crystal structure. Groups of silicon and oxygen are placed on a hexagonal grid. Fig.3.03: Close-up view 800x800, 81kb: Figure 3.03 is a close-up view of the same structure. 'Quartz Crystal Oscillation Type' works with quartz plates vibration. An ideal quartz crystal is one large molecule.This name (it's so long, isn't it?) factors as bellow CRTM stands for Crystal Rate Thickness Monitor, and it's ULVAC's Quartz Crystal Oscillation Type Deposition Controller.

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